Published 2018 | Version v1
Book Metadata-only

Obtaining absolutely calibrated emission spectra of Xe laser plasma in the far ultraviolet range for EUV lithography

Creators

  • 1. SPbPU, Sankt-Peterburg (Russian Federation)
  • 2. FTI, Sankt-Peterburg (Russian Federation)

Description

no abstract available

Part of:
International conference «Physics.SPb». Thesis of reports

Additional details

Additional titles

Original title (Russian)
Получение абсолютно калиброванных спектров излучения Xе лазерной плазмы в диапазоне дальнего ультрафиолета для целей EUV литографии

Publishing Information

Publisher
FTI im. A.F. Ioffe
Imprint Place
Sankt-Peterburg (Russian Federation)
ISBN
978-5-00071-172-9
Imprint Title
International conference #Left-Pointing Double Angle Quotation Mark#Physics.SPb#Right-Pointing Double Angle Quotation Mark#. Thesis of reports
Imprint Pagination
337 p.
Journal Page Range
p. 259

Conference

Title
International conference 'Physics.SPb'
Original Conference Title
Mezhdunarodnaya konferentsiya «FizikA.SPb»
Dates
23-25 Oct 2018
Place
Sankt-Peterburg (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
52026820
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
BRAGG REFLECTION; CALIBRATION; COMPARATIVE EVALUATIONS; EXTREME ULTRAVIOLET RADIATION; LASER RADIATION; MATHEMATICAL MODELS; MIRRORS; PLASMA; WAVELENGTHS; XENON
Descriptors DEC
ELECTROMAGNETIC RADIATION; ELEMENTS; EVALUATION; FLUIDS; GASES; NONMETALS; RADIATIONS; RARE GASES; REFLECTION; ULTRAVIOLET RADIATION

Optional Information

Notes
3 refs. Imprint:Mezhdunarodnaya konferentsiya #Left-Pointing Double Angle Quotation Mark#FizikA.SPb#Right-Pointing Double Angle Quotation Mark#. Tezisy dokladov