Published May 1989
| Version v1
Journal article
Mixed-metal-oxide planar optical waveguides
- 1. IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
Description
Thin films of ZrO2--SiO2 were deposited by reactive magnetron sputtering and reactive ion beam sputter deposition. The films were fabricated into planar optical waveguides by either ion beam milling or using liftoff lithography. The indices of refraction of the mixed-oxide films were found to be approximately a linear function of composition and were varied from 2.15 to 1.67. The films with >12% SiO2 were amorphous and thermally stable to at least 500 0C. Optical loss measurements on films with high ZrO2 content indicated losses of 3 to 4 dB/cm
Additional details
Publishing Information
- Journal Title
- Journal of Vacuum Science and Technology, A
- Journal Volume
- 7
- Journal Issue
- 3
- Series
- J. Vac. Sci. Technol., A.
- Journal Page Range
- 1294-1297
- ISSN
- 0734-2101
- CODEN
- JVTAD
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 20051811
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Descriptors DEI
- AMORPHOUS STATE; DEPOSITION; FABRICATION; ION BEAMS; MAGNETRONS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SILICATES; SPUTTERING; THIN FILMS; WAVEGUIDES; ZIRCONIUM OXIDES
- Descriptors DEC
- BEAMS; CHALCOGENIDES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; FILMS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SILICON COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS