Published 1988
| Version v1
Journal article
The ZBA-21 electron-beam exposure system
Description
Short note
Additional details
Publishing Information
- Journal Title
- Jena Rev.
- Journal Volume
- 33
- Journal Issue
- 1
- Series
- Jena Rev.
- Journal Page Range
- 22-23
- ISSN
- 0448-9497
- CODEN
- JNARA
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- German Democratic Republic
- INIS RN
- 19105871
- Subject category
- S07: ISOTOPES AND RADIATION SOURCES;
- Resource subtype / Literary indicator
- No Abstract
- Descriptors DEI
- ACCURACY; ELECTRON BEAM MACHINING; INTEGRATED CIRCUITS; PRODUCTIVITY; SPECIFICATIONS
- Descriptors DEC
- ELECTRONIC CIRCUITS; MACHINING