Magnetic actuation of thick film multi-material compliant mechanisms

This work presents models and experimental validation of magnetically actuated silicon mechanisms with elastomer hinges. Combining both highly compliant hinges and magnetic actuation results in mechanisms that can be actuated with large torques, large displacements, and high power. A single link mechanism is modeled, fabricated, and tested as a proof-of-concept device for this approach. The fabricated elastomer used in this work is characterized for its static and dynamic properties, and the dipoles of the magnetic materials used are also characterized. Using these measured material properties, the modeled behavior of the single link mechanism is then compared to experimental results in both static and dynamic tests. The resulting link can be statically actuated over 150° (75.1° in both directions) with a maximum applied power from the magnetic field of 0.70 mW at resonance. (paper)