Published September 2003 | Version v1
Journal article

Anomalous charge collection from silicon-on-insulator structures

Description

An increased single event upset cross-section was found in some silicon-on-insulator (SOI) devices in recent experiments. In order to investigate this unexpected increase we performed both broad beam and microbeam experiments on thermal oxide capacitors. Charge collection was measured using ion beam induced charge collection (IBICC) and time resolved IBICC under different biasing conditions. Lateral charge collection profiles were recorded across the top electrode. We found that the collected charge strongly depends on the applied bias and the oxide thickness. Lateral non-uniformity was observed for low bias conditions. In this paper we will give a qualitative explanation for the charge collection mechanism in SOI devices

Additional details

Identifiers

PII
S0168583X03010723;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
210
Journal Issue
1
Journal Page Range
p. 211-215
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
8. international conference on nuclear microprobe technology and applications
Dates
8-13 Sep 2002
Place
Takasaki (Japan)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
34077607
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CAPACITORS; CHARGE COLLECTION; CROSS SECTIONS; ELECTRICAL INSULATORS; ELECTRODES; ION BEAMS; SEMICONDUCTOR DEVICES; SILICON; SPATIAL DISTRIBUTION; THICKNESS; TIME RESOLUTION
Descriptors DEC
BEAMS; DIMENSIONS; DISTRIBUTION; ELECTRICAL EQUIPMENT; ELEMENTS; EQUIPMENT; RESOLUTION; SEMIMETALS; TIMING PROPERTIES

Optional Information

Copyright
Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.