Published September 2003
| Version v1
Journal article
Anomalous charge collection from silicon-on-insulator structures
Description
An increased single event upset cross-section was found in some silicon-on-insulator (SOI) devices in recent experiments. In order to investigate this unexpected increase we performed both broad beam and microbeam experiments on thermal oxide capacitors. Charge collection was measured using ion beam induced charge collection (IBICC) and time resolved IBICC under different biasing conditions. Lateral charge collection profiles were recorded across the top electrode. We found that the collected charge strongly depends on the applied bias and the oxide thickness. Lateral non-uniformity was observed for low bias conditions. In this paper we will give a qualitative explanation for the charge collection mechanism in SOI devices
Additional details
Identifiers
- PII
- S0168583X03010723;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 210
- Journal Issue
- 1
- Journal Page Range
- p. 211-215
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 8. international conference on nuclear microprobe technology and applications
- Dates
- 8-13 Sep 2002
- Place
- Takasaki (Japan)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 34077607
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CAPACITORS; CHARGE COLLECTION; CROSS SECTIONS; ELECTRICAL INSULATORS; ELECTRODES; ION BEAMS; SEMICONDUCTOR DEVICES; SILICON; SPATIAL DISTRIBUTION; THICKNESS; TIME RESOLUTION
- Descriptors DEC
- BEAMS; DIMENSIONS; DISTRIBUTION; ELECTRICAL EQUIPMENT; ELEMENTS; EQUIPMENT; RESOLUTION; SEMIMETALS; TIMING PROPERTIES
Optional Information
- Copyright
- Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.