Electrochemical synthesis of highly ordered nanowires with a rectangular cross section using an in-plane nanochannel array

Rapid and reproducible assembly of aligned nanostructures on a wafer-scale is a crucial, yet one of the most challenging tasks in the incorporation of nanowires into integrated circuits. We present the synthesis of a periodic nanochannel template designed for electrochemical growth of perfectly aligned, rectangular nanowires over large areas. The nanowires can be electrically contacted and characterized in situ using a pre-patterned multi-point measurement platform. During the measurement the wires remain within a thick oxide matrix providing protection against breaking and oxidation. We use laser interference lithography, reactive ion etching and atomic layer deposition to create cm-long parallel nanochannels with characteristic dimensions as small as 40 nm. In a showcase study pulsed electrodeposition of iron is carried out creating rectangular shaped iron nanowires within the nanochannels. By design of the device, the grown wires are in contact with an integrated electrode system on both ends directly after the deposition. No further processing steps are required for electrical characterization, minimizing the risk of damage and oxidation. The developed nanowire measurement device allows for multi-probe resistance measurements and can easily be adopted for transistor applications. The guided, in-plane growth of electrodeposited nanowire arrays which are tunable in size and density paves the way for the incorporation of nanowires into a large variety of multifunctional devices. (paper)