Published December 15, 1988 | Version v1
Journal article

Electron detection by means of silicon solid state imagers

  • 1. IMEC, Leuven (Belgium)

Description

In this paper the principle of the detection of energetic electrons (5-50 keV) by means of silicon solid state imagers is discussed. A model is developed which allows to calculate the electron gain. This study reveals the necessity of a process modification in order to control the dead layer thickness. These principles are adopted in the design and fabrication of two CCDs for electron detection in specific applications. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research, Section A
Journal Volume
273
Journal Issue
2/3
Series
Nucl. Instrum. Methods Phys. Res., Sect. A.
Journal Page Range
636-639
ISSN
0168-9002
CODEN
NIMAE

Conference

Title
London conference on position sensitive detectors.
Dates
7-11 Sep 1987.
Place
London (UK).