A reflectivity profilometer for the optical characterisation of graded reflectivity mirrors in the 250 nm - 1100 nm spectral region
Creators
- 1. ENEA, Centro Ricerche Casaccia, Rome (Italy). Dipt. Innovazione
Description
It's developed the prototype of an instrument that can be used for the optical characterisation of graded reflectivity mirrors at any wavelength in the spectral region from 250 nm to 1100 nm. The instrument utilises a high-pressure Xe arc lamp as light source. Light is spectrally filtered by means of a grating monochromator. The sample is illuminated with an image of the monochromator exit slit. After reflection from the sample, this image is projected onto a 1024-elements charge-coupled device linear array driven by a digital frame board and interfaced with a personal computer. It's tested the instrument accuracy by comparing measurement results with the corresponding ones obtained by means of a laser scanning technique. Measurement Rms repeatability has been estimated to be approximately of 0.8%
Availability note (English)
Available from INIS in electronic formAbstract (Italian)
E' stato sviluppato il prototipo di uno strumento per la catatterizzazione ottica di specchi a riflettivita' variabile, operante a qualsiasi lunghezza d'onda nell'intervallo spettrale da 250 nm a 1100 nm. La sorgente dello strumento e' una lampada ad arco allo Xenon ad alta pressione. La luce e' filtrata spettralmente per mezzo di un monocromatore a reticolo. Il campione viene illuminato da un'immagine della fenditura d'uscita del monocromatore. Dopo essere stata riflessa dal campione, questa immagine viene proiettata su un array CCD lineare a 1024 elementi, connesso elettronicamente a una scheda digitale e interfacciato a un personal computer. L'accuratezza dello strumento e' stata verificata confrontando alcune misure con le corrispondenti misure ottenute mediante una tecnica a scansione laser. La ripetibilita' RMS delle misure e' stata stimata essere circa dello 0.8%Files
29062708.pdf
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Additional details
Publishing Information
- Imprint Pagination
- 17 p.
- ISSN
- 1120-5571
- Report number
- ENEA-RT-INN--98-5
INIS
- Country of Publication
- Italy
- Country of Input or Organization
- Italy
- INIS RN
- 29062708
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- MIRRORS; OPTICAL PROPERTIES; REFLECTIVITY; SPECTRAL REFLECTANCE; TESTING; THIN FILMS
- Descriptors DEC
- FILMS; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; SURFACE PROPERTIES