Miniature Ion Source KLAN-10M with a Plasma Neutralizer

The results of testing a new miniature accelerated ion source (KLAN-10M) with a plasma neutralizer are reported. In particular, the operating modes of the source are studied, and the dependences of the ion-beam diameter and the ion current distribution along the output aperture surface on distance are measured. The ion current density with an output-aperture diameter of 7 mm (flat ion optics) is 10.4 mA/cm², which allows one to precisely correct local errors in the surface shape of the optical components at a low beam divergence (≈15%). The operation of the plasma neutralizer is studied, the resulting electronic current of which provides, for this design, incomplete compensation of the space charge in a beam (the neutralizer current is 10 times less than the current of ions).