Thick epitaxial Pb(Zr0.35, Ti0.65)O3 films grown on (100)CaF2 substrates with polar-axis-orientation
Creators
- 1. Tokyo Inst. of Technology, Dept. of Innovative and Engineering Materials, Yokohama, Kanagawa (Japan)
- 2. Bruker AXS, Application Laboratory, Yokohama, Kanagawa (Japan)
Description
(100)/(001)-oriented tetragonal Pb(Zr,Ti)O3(PZT) films, which were thicker than 2 μm, were epitaxially grown on SrRuO3-covered (100)Si, (100)KTaO3, (100)SrTiO3, and (100)CaF2 substrates by metal organic chemical vapor deposition. The volume fraction of the (001)-orientation almost linearly increased as the thermal strain increased during the cooling process from the deposition temperature to the Curie temperature. Consequently, perfectly (001)-oriented, i.e., polar-axis-oriented, thick films were obtained on CaF2 substrates with a remanent polarization of 71 μC/cm2. This approach to grow polar-axis-oriented PZT thick films enabled the intrinsic piezoelectricity of PZT itself to be clarified, and has potential in novel applications. (author)
Additional details
Identifiers
Publishing Information
- Journal Title
- Applied Physics Express
- Journal Volume
- 1
- Journal Issue
- 8
- Journal Page Range
- p. 085001.1-085001.3
- ISSN
- 1882-0778
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 40055718
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; CALCIUM FLUORIDES; CHEMICAL VAPOR DEPOSITION; CURIE POINT; ELECTRIC FIELDS; EPITAXY; FERROELECTRIC MATERIALS; FILMS; HYSTERESIS; ORIENTATION; PIEZOELECTRICITY; POLARIZATION; PZT; SAMPLE PREPARATION; SCANNING ELECTRON MICROSCOPY; STRAINS; SUBSTRATES; X-RAY DIFFRACTION
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CALCIUM COMPOUNDS; CALCIUM HALIDES; CHEMICAL COATING; COHERENT SCATTERING; CRYSTAL GROWTH METHODS; DEPOSITION; DIELECTRIC MATERIALS; DIFFRACTION; ELECTRICITY; ELECTRON MICROSCOPY; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; LEAD COMPOUNDS; MATERIALS; MICROSCOPY; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; SURFACE COATING; THERMODYNAMIC PROPERTIES; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION TEMPERATURE; ZIRCONATES; ZIRCONIUM COMPOUNDS
Optional Information
- Notes
- 15 refs., 5 figs.