Some effects on SPM based surface measurement

The scanning probe microscope (SPM) has been used as a powerful tool for nanotechnology, especially in surface nanometrology. However, there are a lot of false images and modifications during the SPM measurement on the surfaces. This is because of the complex interaction between the SPM tip and the surface. The origin is not only due to the tip material or shape, but also to the structure of the sample. So people are paying much attention to draw true information from the SPM images. In this paper, we present some simulation methods and reconstruction examples for the microstructures and surface roughness based on SPM measurement. For example, in AFM measurement, we consider the effects of tip shape and dimension, also the surface topography distribution in both height and space. Some simulation results are compared with other measurement methods to verify the reliability