Velocity distribution of mass-selected nano-size cluster ions
- 1. Institute of Physics, University Greifswald, Felix-Hausdorff-Strasse 6, 17489 Greifswald (Germany)
- 2. Leibniz Institute for Plasma Science and Technology (INP Greifswald), Felix-Hausdorff-Strasse 2, 17489 Greifswald (Germany)
- 3. Joint Institute for High Temperatures, Russian Academy of Sciences, Bldg. 2, Izhorskaya ul. 13, Moscow 125412 (Russian Federation)
Description
The paper reports on an experimental investigation of the ion velocity distribution function (IVDF) for mass-selected copper cluster ions with a diameter in the range 5–10 nm. The cluster ion beam is produced by a dc magnetron-based gas aggregation source. The measurements are carried out by means of a quadrupole mass filter combined with a basic retarding field analyser. The most probable cluster velocities are in the range 80–180 m s−1; decreasing with cluster size and increasing with buffer gas (Ar) flow. Experimental results are compared with the theoretical model of Smirnov et al. Noted discrepancies are explained by the interaction of clusters with buffer gas atoms outside the aggregation chamber during the passage from the orifice towards the detector. This interaction is not included in the theoretical model. Both positively and negatively charged clusters are investigated. The density ratio of positively to negatively charged clusters in the beam is evaluated from the measured IVDFs and compared with the theoretical model. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/0963-0252/22/4/045011Additional details
Identifiers
Publishing Information
- Journal Title
- Plasma Sources Science and Technology
- Journal Volume
- 22
- Journal Issue
- 4
- Journal Page Range
- [10 p.]
- ISSN
- 0963-0252
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 46007992
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ATOMS; COMPARATIVE EVALUATIONS; DISTRIBUTION FUNCTIONS; ION PAIRS; MAGNETRONS; MASS; ORIFICES; VELOCITY
- Descriptors DEC
- ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; EVALUATION; FUNCTIONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OPENINGS