Published September 1, 1975
| Version v1
Patent
Open
Electron microscope
Description
The patent describes an electron microscope with a special kind of wobbler (beam deflection unit). With this wobbler it is possible to obtain a spiral-like or screen-like deflection of the exposing electron beam. Consequently, the aperture of the exposing electron beam is increased. This results in an improvement of the definition of the image
Availability note (English)
MF available from INIS under the Report Number.Files
8328331.pdf
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Additional details
Additional titles
- Original title (Dutch)
- Elektronenmikroskoop
Publishing Information
- Imprint Pagination
- 5 p.
- IPC:
- Int. Cl. H01j37/26; H01j37/147; H01j37/21; H01j37/153.
- IPC
- Int. Cl. H01j37/26; H01j37/147; H01j37/21; H01j37/153.
- Patent number
- NL patent document 7510276/A/
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 8328331
- Subject category
- S42: ENGINEERING;
- Descriptors DEI
- APERTURES; BEAM OPTICS; BEAM PROFILES; BEAM SHAPING; ELECTRON BEAMS; ELECTRON MICROSCOPES; RESOLUTION
- Descriptors DEC
- BEAMS; LEPTON BEAMS; MICROSCOPES; OPENINGS; PARTICLE BEAMS
Optional Information
- Notes
- 1 fig.