Deposition of SnSxOy films by electrochemical deposition using three-step pulse and their characterization
Creators
- 1. Nagoya Inst. of Technology, Electronics and Mechanics, Dept. of Engineering Physics, Nagoya, Aichi (Japan)
Description
We deposited tin sulfide (-oxide) films by the electrochemical deposition (ECD) from an aqueous solution containing SnSO4 and Na2S2O3. This technique is simple and cost-effective, and the films can be deposited on a large area with reasonable quality. We used a new potential pulse form called the three-step pulse, consisting of reduction (deposition), oxidation (dissolution), and intermediate (diffusion) steps. We optimized the diffusion step potential considering the surface morphology, and found that under optimized pulse conditions, surface morphology and photosensitivity were improved compared with those in the two-step pulse case. Considering the current profile during deposition, the effects of introducing the diffusion step on both surface morphology and film composition were discussed in details. (author)
Additional details
Publishing Information
- Journal Title
- Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications and Review Papers
- Journal Volume
- 45
- Journal Issue
- 3A
- Journal Page Range
- p. 1500-1505
- ISSN
- 0021-4922
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 37067704
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- AUGER ELECTRON SPECTROSCOPY; COMPARATIVE EVALUATIONS; ELECTROCHEMISTRY; ELECTRODEPOSITION; PHOTOCURRENTS; PHOTOSENSITIVITY; PULSE TECHNIQUES; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TIN OXIDES; TIN SULFIDES; X-RAY DIFFRACTION
- Descriptors DEC
- CHALCOGENIDES; CHEMISTRY; COHERENT SCATTERING; CURRENTS; DEPOSITION; DIFFRACTION; ELECTRIC CURRENTS; ELECTROLYSIS; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; EVALUATION; FILMS; LYSIS; MICROSCOPY; OXIDES; OXYGEN COMPOUNDS; SCATTERING; SENSITIVITY; SPECTROSCOPY; SULFIDES; SULFUR COMPOUNDS; SURFACE COATING; TIN COMPOUNDS
Optional Information
- Notes
- 16 refs., 6 figs.