Published August 1, 2000
| Version v1
Journal article
The crystal perfection improvement of Y1Ba2Cu3O7-x thin films by afterglow plasma process
Creators
- 1. Univ. of Electron. Sci. and Technol., Chengdu (China). Inst. of Inf. Mater. Sci. and Eng.
- 2. Institut fuer Nukleare Festkoerperphysik, Forschungszentrum Karlsruhe, P.O. Box 3640, D-76021, Karlsruhe (Germany)
Description
In this article, we report the growth of purely (001) oriented single crystal Y1Ba2Cu3O7-x thin films with excellent crystal perfection by afterglow plasma sputtering. Because of little energetic ion and electron bombardment, the crystal perfection of Y1Ba2Cu3O7-x thin films was significantly improved. The full width at half-maximum value of the rocking curve around the (005) diffraction peak of the films is 0.12 . The experiments demonstrate that the afterglow plasma process is very appropriate for the preparation of high-quality Y1Ba2Cu3O7-x thin films, which are very sensitive to ion bombardment effects. (orig.)
Additional details
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 371
- Journal Issue
- 1-2
- Journal Page Range
- p. 231-234
- ISSN
- 0040-6090
- CODEN
- THSFAP
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Switzerland
- INIS RN
- 31043555
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; BARIUM COMPOUNDS; CRYSTAL STRUCTURE; HIGH-TC SUPERCONDUCTORS; ION BEAMS; MICROSCOPY; SPUTTERING; SUPERCONDUCTING FILMS; THIN FILMS; TRANSITION TEMPERATURE; X-RAY DIFFRACTION; YTTRIUM COMPOUNDS
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BEAMS; COHERENT SCATTERING; DIFFRACTION; FILMS; MICROSCOPY; PHYSICAL PROPERTIES; SCATTERING; SUPERCONDUCTORS; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; TYPE-II SUPERCONDUCTORS
Optional Information
- Notes
- 8 refs.