Hydrogen effects on deep level defects in proton implanted Cu(In,Ga)Se2 based thin films

Hydrogen effects on deep level defects and a defect generation in proton implanted Cu(In,Ga)Se2 (CIGS) based thin films for solar cell were investigated. CIGS films with a thickness of 3 μm were grown on a soda-lime glass substrate by a co-evaporation method, and then were implanted with protons. To study deep level defects in the proton implanted CIGS films, deep level transient spectroscopy measurements on the CIGS-based solar cells were carried out, these measurements found 6 traps (including 3 hole traps and 3 electron traps). In the proton implanted CIGS films, the deep level defects, which are attributed to the recombination centers of the CIGS solar cell, were significantly reduced in intensity, while a deep level defect was generated around 0.28 eV above the valence band maximum. Therefore, we suggest that most deep level defects in CIGS films can be controlled by hydrogen effects. - Highlights: ►Proton implanted Cu(In,Ga)Se2 thin film and solar cell are prepared. ►Deep level defects of Cu(In,Ga)Se2 thin film and solar cell are investigated. ►Hydrogenation using proton implantation and H2 annealing reduces deep level defects. ►Hydrogenation could enhance electrical properties and efficiency of solar cells.