Assessment of surface profile data acquired by a stylus profilometer

This paper analyzes the 2D and 3D distortion effects of a measured profile caused by the stylus tip radius of a stylus-type surface profilometer. On the basis of our analysis results, we propose the selection criteria for the stylus tip radius to improve the reliability of measurement results. For that purpose, a simulation algorithm has been devised and implemented for 2D and 3D measurement simulations, and the 3D surface texture used in simulation was obtained using an atomic force microscope from an actual machined surface to improve the reliability of simulation results. The simulation results were compared with the measured results from the same specimen using a roughness tester, and the validity of analysis via the simulation proposed in this study was confirmed. Cumulative power spectral analysis was performed for the 2D and 3D simulated profiles obtained from simulation. On the basis of the analysis results, an effective frequency component field was clarified using a stylus-type profilometer, and the selection criteria of the stylus tip radius for measurement were proposed considering the surface texture characteristics of the specimen. (paper)