Published April 1987
| Version v1
Journal article
Microanalysis of fluorine using the 19F(p,α0)16O reaction
Creators
- 1. Jordan Univ., Amman. Dept. of Physics
- 2. IBM Research Div., Yorktown Heights, NY (USA)
Description
The 19F(p,α0)16O nuclear reaction semms to be an excellent method for high resolution fluorine depth profiling. Target tilting, a pulse pileup rejection circuit and a high resolution solid state detector were employed. Magnesium fluoride, calcium fluoride and fluorohydrocarbon targets of different thickness were used. The detection of the outcoming alpha particles was done with and without Kapton foils. A depth profile resolution of 10 nm was obtained and 3 nm appears to be feasible. (orig.)
Additional details
Publishing Information
- Journal Title
- Nucl. Instrum. Methods Phys. Res., Sect. B
- Journal Volume
- 24/25
- Journal Issue
- pt.2
- Series
- Nucl. Instrum. Methods Phys. Res., Sect. B.
- Journal Page Range
- 691-694
- ISSN
- 0168-583X
- CODEN
- NIMBE
Conference
- Title
- 9. international conference on the application of accelerators in research and industry.
- Dates
- 10-12 Nov 1986.
- Place
- Denton, TX (USA).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 18072025
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALPHA DETECTION; ALPHA PARTICLES; ALPHA SPECTRA; CALCIUM FLUORIDES; DEPTH; ENERGY DEPENDENCE; ENERGY SPECTRA; EXCITATION FUNCTIONS; FLUORINE; FLUORINE 19 TARGET; FOILS; INTEGRAL CROSS SECTIONS; MAGNESIUM FLUORIDES; MEV RANGE 01-10; MEV RANGE 10-100; NUCLEAR REACTION ANALYSIS; ORGANIC FLUORINE COMPOUNDS; OXYGEN 16; PROTON REACTIONS; PULSE CIRCUITS; PULSE PILEUP; SENSITIVITY; SPATIAL DISTRIBUTION; SPATIAL RESOLUTION; SURFACE BARRIER DETECTORS; THREE-NUCLEON TRANSFER REACTIO
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARYON REACTIONS; CALCIUM COMPOUNDS; CALCIUM HALIDES; CHARGED PARTICLE DETECTION; CHARGED PARTICLES; CHEMICAL ANALYSIS; CROSS SECTIONS; DETECTION; DIMENSIONS; DIRECT REACTIONS; DISTRIBUTION; ELECTRONIC CIRCUITS; ELEMENTS; ENERGY RANGE; EVEN-EVEN NUCLEI; FLUORIDES; FLUORINE COMPOUNDS; HADRON REACTIONS; HALIDES; HALOGEN COMPOUNDS; HALOGENS; HELIUM IONS; IONIZING RADIATIONS; IONS; ISOTOPES; LIGHT NUCLEI; MAGNESIUM COMPOUNDS; MEASURING INSTRUMENTS; MEV RANGE; MULTI-NUCLEON TRANSFER REACTIO; NONDESTRUCTIVE ANALYSIS; NONMETALS; NUCLEAR REACTIONS; NUCLEI; NUCLEON REACTIONS; ORGANIC COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; OXYGEN ISOTOPES; RADIATION DETECTION; RADIATION DETECTORS; RADIATIONS; RESOLUTION; SEMICONDUCTOR DETECTORS; SPECTRA; STABLE ISOTOPES; TARGETS; TRANSFER REACTIONS