Published March 1980
| Version v1
Journal article
Superconducting properties of Nb and NbN films synthesized by rf cathode sputtering
Creators
- 1. Institute of Radio Engineering and Electronics, Academy of Sciences of the USSR
Description
The optimum conditions for synthesizing Nb and NbN films by rf cathode sputtering are studied. The dependence of the critical temperature T/sub c/ on the film thickness which is observed for these films can be attributed to the proximity of the film to a surface layer with a relatively low value of T/sub c/
Additional details
Publishing Information
- Journal Title
- Sov. Phys. - Tech. Phys. (Engl. Transl.)
- Journal Volume
- 25
- Journal Issue
- 3
- Series
- Sov. Phys. - Tech. Phys. (Engl. Transl.).
- Journal Page Range
- 343-346
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 13668155
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- CATHODE SPUTTERING; CRITICAL TEMPERATURE; FILMS; NIOBIUM; NIOBIUM NITRIDES; SUPERCONDUCTIVITY; SUPERCONDUCTORS; SYNTHESIS; THICKNESS
- Descriptors DEC
- DIMENSIONS; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELEMENTS; METALS; NIOBIUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; PHYSICAL PROPERTIES; SPUTTERING; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; TRANSITION TEMPERATURE