Prospects for the creation of an optical-mechanical unit for a high-resolution nanolithograph

In this paper the proposals for solution of problems related to the creation of an optical-mechanical unit of promising models of a high-resolution laser nanolithograph are considered. The approaches to the implementation of the rotation module and of the linear displacement carriage of the recording head are considered aimed at reducing the temperature distortion of the synthesized element topology including due to the observance of the principle of symmetry of the nanolithograph main elements location and the points of application of the forces of its actuators relative to the main plane of the installation. The feasibility of creating a two-channel version of a nanolithograph that makes it possible to compensate in real time (while the substrate rotates) the resulting temperature distortions of the topology generated by external and internal heat sources is discussed. It is shown that the usage in the two-channel version of a nanolithograph of the differential-type laser interferometers allows reducing the distortions of the formed element topology up to tenths of a nanometer. (paper)