Niobium Thin Film Properties Affected by Deposition Energy during Vacuum Deposition

In order to understand and improve the super-conducting performance of niobium thin films at cryogenic temperatures, an energetic vacuum deposition system has been developed to study deposition energy effects on the properties of niobium thin films on various substrates. Ultra high vacuum avoids the gaseous inclusions in thin films commonly seen in sputtering deposition. A retarding field energy analyzer is used to measure the kinetic energy of niobium ions at the substrate location. A biased substrate holder controls the deposition energy. Transition temperature and residual resistivity ratio (RRR) of the niobium thin films at several deposition energies are obtained together with crystal orientation measurements and atomic force microscope (AFM) inspection, and the results show that there exists a preferred deposition energy around 115eV (the average deposition energy 64 eV plus the 51 V bias voltage)