Published October 15, 2010
| Version v1
Journal article
Zinc oxide films chemically grown onto rigid and flexible substrates for TFT applications
- 1. Electrical Engineering Department, Technological Educational Institute of Crete, 71004 Heraklion, Crete (Greece)
- 2. Center of Materials Technology and Photonics, School of Applied Technology, Technological Educational Institute of Crete, 71004 Heraklion, Crete (Greece)
Description
This contribution presents some preliminary results regarding the use of a chemical route for the growth of good quality ZnO thin films that can be used for the fabrication of thin film transistors (TFTs). The films were grown at rather low temperature (60 oC) on glass and PET substrates using non-aqueous (zinc acetate dihydrate in methanol) precursor solution and their surface morphology, crystalline structure, optical transmittance and electrical characteristics were studied. The study indicated that good quality films with desirable ZnO structure onto rigid and flexible substrates can be obtained, using a simple, cheap, low temperature chemical growth method.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.physb.2010.07.048Additional details
Identifiers
- DOI
- 10.1016/j.physb.2010.07.048;
- PII
- S0921-4526(10)00758-1;
Publishing Information
- Journal Title
- Physica. B, Condensed Matter
- Journal Volume
- 405
- Journal Issue
- 20
- Journal Page Range
- p. 4389-4392
- ISSN
- 0921-4526
- CODEN
- PHYBE3
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 41132819
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ACETATES; AQUEOUS SOLUTIONS; FABRICATION; GLASS; GROWTH; HYDRATES; METHANOL; MORPHOLOGY; PRECURSOR; SUBSTRATES; SURFACES; TEMPERATURE RANGE 0065-0273 K; THIN FILMS; TRANSISTORS; ZINC; ZINC OXIDES
- Descriptors DEC
- ALCOHOLS; CARBOXYLIC ACID SALTS; CHALCOGENIDES; DISPERSIONS; ELEMENTS; FILMS; HOMOGENEOUS MIXTURES; HYDROXY COMPOUNDS; METALS; MIXTURES; ORGANIC COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; SEMICONDUCTOR DEVICES; SOLUTIONS; TEMPERATURE RANGE; ZINC COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2010 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.