Published November 13, 2006
| Version v1
Journal article
Plasma Immersion Ion Implantation with a 4kV/10kHz Compact High Voltage Pulser
- 1. Associated Laboratory of Plasma, National Institute for Space Research, Av. dos Astronautas 1758, Sao Jose dos Campos, Sao Paulo (Brazil)
- 2. Institute of Ion Beam Physics and Materials Research, Rossendorf, Dresden (Germany)
- 3. Department of Aeronautics and Mechanics, Technological Institute of Aeronautics, Sao Jose dos Campos, Sao Paulo (Brazil)
Description
Development of a 4 kV/10 kHz Compact High Voltage Pulser and its application to nitrogen plasma immersion ion implantation (PIII) of different materials as Si, Al alloys, SS304 stainless steel and Ti alloys are discussed. Low voltage (1-5 kV) pulses at high frequencies (up to 20 kHz for 2 kV) were obtained with maximum power delivered at 5 kV, 7 kHz. These conditions were not sufficient to reach temperatures above 200 deg. C in the samples because of short duration of the pulses. However, very shallow implantations of nitrogen in Si, Al5052, SS304 were observed by Auger electron spectroscopy and improved corrosion resistance was obtained for Al5052 when it was treated by nitrogen PIII at 2.5 kV, 5μs and 5 kHz pulses
Additional details
Identifiers
- DOI
- 10.1063/1.2401503;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 866
- Journal Issue
- 1
- Journal Page Range
- p. 237-240
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 16. international conference on ion implantation technology
- Acronym
- IIT 2006
- Dates
- 11-16 Jun 2006
- Place
- Marseille (France)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 38056362
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM ALLOYS; AUGER ELECTRON SPECTROSCOPY; CORROSION RESISTANCE; DEPOSITION; ELECTRIC POTENTIAL; ION IMPLANTATION; KHZ RANGE 01-100; NITROGEN; PLASMA; SILICON ALLOYS; STAINLESS STEEL-304; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0400-1000 K; TITANIUM ALLOYS
- Descriptors DEC
- ALLOYS; AUSTENITIC STEELS; CARBON ADDITIONS; CHROMIUM ALLOYS; CHROMIUM-NICKEL STEELS; CORROSION RESISTANT ALLOYS; ELECTRON SPECTROSCOPY; ELEMENTS; FREQUENCY RANGE; HEAT RESISTANT MATERIALS; HEAT RESISTING ALLOYS; HIGH ALLOY STEELS; IRON ALLOYS; IRON BASE ALLOYS; KHZ RANGE; MATERIALS; NICKEL ALLOYS; NONMETALS; SPECTROSCOPY; STAINLESS STEELS; STEEL-CR19NI10; STEELS; TEMPERATURE RANGE; TRANSITION ELEMENT ALLOYS
Optional Information
- Notes
- (c) 2006 American Institute of Physics