Published March 31, 2010
| Version v1
Journal article
Enhanced characterization of ITO films deposited on PET by RF superimposed DC magnetron sputtering
Creators
- 1. Department of Materials Science and Engineering, Pusan National University, Busan, 609-735 (Korea, Republic of)
- 2. National Core Research Center for Hybrid materials Solution Materials, Pusan National University, Busan 609-735 (Korea, Republic of)
Description
Tin-doped indium oxide (ITO) films were deposited on polyethylene terephthalate substrates by RF superimposed DC magnetron sputtering using an ITO target composed of In2O3 (90 wt.%):SnO2 (10 wt.%). The total sputtering power was maintained at 70 W and the power ratio of RF/(RF + DC) was varied from 0 to 100% in steps of 25%. The discharge voltage and deposition rate decreased with increasing RF/(RF + DC) power ratio. The ITO film deposited at a 50% RF portion of the total power showed the lowest resistivity (3.18 x 10-4 Ωcm), high transmittance (87.5%) and relatively good mechanical durability, which was evaluated using bending and scratch tests.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.tsf.2009.08.017Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2009.08.017;
- PII
- S0040-6090(09)01388-1;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 518
- Journal Issue
- 11
- Journal Page Range
- p. 3085-3088
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- 6. international symposium on transparent oxide thin films for electronics and optics
- Acronym
- TOEO-6
- Dates
- 15-17 Apr 2009
- Place
- Tokyo (Japan)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 42054792
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BENDING; DEPOSITION; DOPED MATERIALS; INDIUM OXIDES; MAGNETRONS; POLYESTERS; SPUTTERING; THIN FILMS; TIN; TIN OXIDES
- Descriptors DEC
- CHALCOGENIDES; DEFORMATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; ESTERS; FILMS; INDIUM COMPOUNDS; MATERIALS; METALS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; ORGANIC COMPOUNDS; ORGANIC POLYMERS; OXIDES; OXYGEN COMPOUNDS; POLYMERS; TIN COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.