Analysis of compensation for a g-sensitivity scale-factor error for a MEMS vibratory gyroscope

In this paper, we present recent work on the g-sensitivity error of the MEMS vibratory gyroscope. Generally, the g-sensitivity error has been ignored in the use of commercial MEMS vibratory gyroscopes, but it deserves our attention if we are to achieve tactical grade performance for military applications. First, we mathematically show the reason the g-sensitivity error occurs as an additional scale-factor error during the use of MEMS vibratory gyroscopes. Then, we estimate the g-sensitivity error using FEM simulation and verify it by experiment using a centrifugal machine. Consequently, we propose a compensation model to accommodate the g-sensitivity error of a gyroscope and confirm the theoretical prediction with experimental results. (paper)