Coating of a substrate with surface preliminarily treated with intensive flows of high-speed electrons and plasma using a magnetron

This paper presents results of the research in influence of preliminary surface treatment on adhesion of film to substrate (St8 or brass-target, CU, Ni-film). The preliminary treatment has been conducted by two methods: first, by compressive plasma flow with charge duration ∼100μs, plasma formation rate (15-20)×10³ m/s; second, by low-energy high-current electron beams with pulse duration 2-3 μs and electron energy up to 30 keV. The investigation shows the strong influence of preliminary sample treatment and processing parameters on adhesion of film to substrate and final roughness. Experimental investigations have revealed the best adhesion of film to substrate, and the smoothest film is corresponding to the mode with preliminary LEHCEB irradiation with electron energy of 25, 30 keV. It was shown that the alternation of deposition with LEHCEB irradiation has resulted in large-scale surface smoothing: the surface has become glassy whereas craters of 10-20 μm have formed. It was shown that the magnetron-covered samples can withstand the saline mist for twice as long as samples with galvanic coatings. (paper)