Published November 1985
| Version v1
Journal article
Two-dimensional, remote micropositioner for a scanning tunneling microscope
Creators
- 1. Department of Physics, University of California, Berkeley, California 94720 and Center for Advanced Materials, Lawrence Berkeley Laboratory, Berkeley, California 94720
Description
A simple walker is described that is suitable as the coarse positioner in a scanning tunneling microscope. The walker is fabricated from a single piece of piezoelectric ceramic and has feet coated with thin metal and insulating films. The walker can move in either of two orthogonal, horizontal directions on an insulated, metallized quartz substrate in steps that can be varied from 25 to 400 nm
Additional details
Publishing Information
- Journal Title
- Rev. Sci. Instrum.
- Journal Volume
- 56
- Journal Issue
- 11
- Series
- Rev. Sci. Instrum.
- Journal Page Range
- 2168-2170
- ISSN
- 0034-6748
- CODEN
- RSINA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 17017621
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- CERAMICS; POSITIONING; QUARTZ; SCANNING ELECTRON MICROSCOPY; SURFACES
- Descriptors DEC
- ELECTRON MICROSCOPY; MICROSCOPY; MINERALS; OXIDE MINERALS