Published 2020
| Version v1
Journal article
Electrical conductivity of lithium tantalate thin film
- 1. Tver State University, Department of Condensed Matter Physics, Tver (Russian Federation)
- 2. National Research University of Electronic Technology 'MIET', Department of Integral Electronics and Microsystems, Moscow (Russian Federation)
- 3. National University of Science and Technology 'MISiS', Department of Materials Science of Semiconductors and Dielectrics, Moscow (Russian Federation)
Description
The electrical conductivity of lithium tantalate thin film on the silicon substrate was studied. The film structure was prepared by RF magnetron sputtering. In general, the current-voltage characteristics were asymmetric and similar to that of a diode. The current voltage characteristics had several sections associated with various transport mechanisms of current carriers. The main conductivity mechanism was related to the space-charge-limited current. The current-voltage characteristics showed that there was a mismatch between the forward and backward runs. One of the reasons for such behavior is a space charge accumulation due to charge carriers which were injected from the electrode and did not relax. (author)
Additional details
Identifiers
Publishing Information
- Journal Title
- Ceramica
- Journal Volume
- 66
- Journal Issue
- 379
- Journal Page Range
- p. 291-296
- ISSN
- 0366-6913
INIS
- Country of Publication
- Brazil
- Country of Input or Organization
- Brazil
- INIS RN
- 51079434
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; HYSTERESIS; LITHIUM; MAGNETRONS; SILICON; SPUTTERING; TANTALATES; THIN FILMS; X-RAY DIFFRACTION
- Descriptors DEC
- ALKALI METALS; COHERENT SCATTERING; DIFFRACTION; ELECTRICAL PROPERTIES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; METALS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; REFRACTORY METAL COMPOUNDS; SCATTERING; SEMIMETALS; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS