Sintering behavior and microwave dielectric properties of High-Q Li2(Mg1−xZnx)3Ti(O0.96F0.08)6 ceramics for LTCC application

Highlights: • The novel low-temperature Li₂(Mg_1−xZn_x)₃Ti(O_0.96F_0.08)₆ ceramics were prepared by the solid-state reaction method. • Microwave dielectric properties of Li₂(Mg_1−xZn_x)₃Ti(O_0.96F_0.08)₆ (0.02 ≤ x ≤ 0.08) ceramics were investigated systematically. • The Li₂(Mg_1−xZn_x)₃Ti(O_0.96F_0.08)₆ ceramics are expected to become low loss candidate materials for LTCC applications. -- Abstract: Li₂(Mg_1−xZn_x)₃Ti(O_0.96F_0.08)₆ (LMZTF) ceramics were fabricated through the solid-state reaction method. All samples diffraction peaks belong to Zn₂TiO₄ and Li₂Mg₃TiO₆. The SEM characterization and bulk density testing demonstrated the uniform microstructure of LMZTF ceramics. In this work, the dielectric loss of Li₂Mg₃Ti(O_0.96F_0.08)₆ ceramics was greatly reduced through ion doping. The High-Q Li₂(Mg_0.98Zn_0.02)₃Ti(O_0.96F_0.08)₆ ceramics sintered at 950 °C for 6 h possessed outgoing microwave dielectric properties: ε_r ~14.64, Q × f ~128,000 GHz, τ_f ~ −33.9 ppm/°C, which made it a promising candidate for low temperature co-fired ceramic (LTCC) applications.