Published 1995 | Version v1
Miscellaneous Metadata-only

Development of a pyrometer for the in situ temperature control of TiN-layers in the plasma coating chamber

Creators

  • 1. Johannes Kepler Univ., Linz (Austria)
  • 2. TCE Technical Coatings Engineering Gesellschaft m.b.H., 8605 Kapfenberg (Austria)

Description

Short communication

Part of:
45. Annual Convention of the Austrian Physical Society

Additional details

Additional titles

Original title (German)
Entwicklung eines Pyrometers zur in situ-Temperaturueberwachung von TiN-Schichten in der Plasmabeschichtungskammer

Publishing Information

Imprint Title
45. Annual Convention of the Austrian Physical Society
Imprint Pagination
214 p.
Journal Page Range
p. 123.
Report number
INIS-mf--14740

Conference

Title
45. Annual Convention of the Austrian Physical Society.
Original Conference Title
45. Jahrestagung der Oesterreichischen Physikalischen Gesellschaft
Dates
18-22 Sep 1995.
Place
Leoben (Austria).

INIS

Country of Publication
Austria
Country of Input or Organization
Austria
INIS RN
27032223
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
LAYERS; LEAD TELLURIDES; MEASURING INSTRUMENTS; PLASMA HEATING; PYROMETERS; RADIATION DETECTORS; SURFACE COATING; SURFACES; TEMPERATURE CONTROL; TEMPERATURE RANGE 0400-1000 K; TITANIUM NITRIDES
Descriptors DEC
CHALCOGENIDES; CONTROL; DEPOSITION; HEATING; LEAD COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; TELLURIDES; TELLURIUM COMPOUNDS; TEMPERATURE RANGE; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
Imprint:45. Jahrestagung der Oesterreichischen Physikalischen Gesellschaft.