Published 1980 | Version v1
Miscellaneous Metadata-only

Properties of amorphous silicon films prepared by CVD of SiF2

Creators

  • 1. Technion-Israel Inst. of Tech., Haifa

Description

no abstract available

Additional details

Publishing Information

Imprint Title
1980 annual meeting
Imprint Pagination
82 p.
Journal Volume
26
Series
Bull. Isr. Phys. Soc.
Journal Page Range
p. 56.
ISSN
0374-2687
Report number
INIS-mf--6542

Conference

Title
Israel Physical Society 1980 annual meeting.
Dates
9 - 10 Apr 1980.
Place
Rehovot, Israel.

INIS

Country of Publication
Israel
Country of Input or Organization
Israel
INIS RN
12631986
Subject category
S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
FILMS; PHYSICAL PROPERTIES; SILICON; SILICON FLUORIDES
Descriptors DEC
ELEMENTS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; SEMIMETALS; SILICON COMPOUNDS

Optional Information

Notes
Published in summary form only.