A study of copper oxide based resistive switching memory by conductive atom force microscope
- 1. Department of Materials Science, Fudan University, No. 220 HanDan Road, Shanghai, 200433 (China)
- 2. Department of Microelectronics, ASIC and System State Key Lab, Fudan University, Shanghai, 200433 (China)
Description
A copper oxide (CuxO) layer was formed by applying plasma oxidization on a copper film grown on a Si substrate. Pt deposited on this CuxO layer then function as the top electrode to form a Pt/CuxO/Cu structure. A device created with this structure exhibited a forming-free bipolar resistive switching property. Conductive atom force microscope (C-AFM) was employed to investigate the nanoscale electrical properties of the device. Based on I–V curve analysis, it was found that the Poole–Frankel and conducting filaments models were suitable for the present device. C-AFM analysis for the sample indicated that the random formation/rupture of conducting paths in the CuxO layer may play a key role for the device instability in high resistance state.
Availability note (English)
Available from http://dx.doi.org/10.1016/j.apsusc.2013.01.217Additional details
Identifiers
- DOI
- 10.1016/j.apsusc.2013.01.217;
- PII
- S0169-4332(13)00292-4;
Publishing Information
- Journal Title
- Applied Surface Science
- Journal Volume
- 271
- Journal Page Range
- p. 407-411
- ISSN
- 0169-4332
- CODEN
- ASUSEE
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 46002945
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; ATOMS; COPPER; COPPER OXIDES; ELECTRICAL PROPERTIES; ELECTRODES; FILAMENTS; FILMS; INSTABILITY; LAYERS; MEMORY DEVICES; NANOSTRUCTURES; OXIDATION; PLASMA; PLATINUM; RANDOMNESS; SUBSTRATES; X-RAY DIFFRACTION
- Descriptors DEC
- CHALCOGENIDES; CHEMICAL REACTIONS; COHERENT SCATTERING; COPPER COMPOUNDS; DIFFRACTION; ELEMENTS; METALS; MICROSCOPY; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; PLATINUM METALS; SCATTERING; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Copyright
- Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.