Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source. Experiment and simulation
- 1. Institut fuer Niedertemperaturplasmaphysik Greifswald, Fr.-L.-Jahn-Strasse 19, 17489 Greifswald (Germany)
- 2. Institut fuer Physik, Ernst-Moritz-Arndt-Universitaet Greifswald, Domstrasse 10a, 17487 Greifswald (Germany)
- 3. Max-Planck-Institut fuer Plasmaphysik, Teilinstitut Greifswald, Wendelsteinstrasse 1, 17489 Greifswald (Germany)
Description
During an experiment involving coating of dust grains trapped in an RF discharge using a sputtering dc-magnetron source, a rotating dust ring was observed and investigated. After the magnetron was switched on, the dust cloud levitating above the RF electrode formed a ring rotating as a rigid body. Langmuir probe diagnostics were used for the measurement of plasma density and potential. It was discovered that the coupling of the dc-magnetron source to the RF discharge causes steep radial gradients in electron density and plasma potential. The rotation of the dust ring is attributed to the azimuthal component of the ion drag force, which appears due to the azimuthal drift of the ions caused by crossed radial electric and axial magnetic fields. In order to get more insight into the mechanism of dust ring rotation, a Particle-in-Cell simulation of a rotating dust cloud was performed. The results of the experiment and simulation are presented and discussed
Availability note (English)
Available online at http://stacks.iop.org/0022-3727/37/2703/d4_19_013.pdf or at the Web site for the Journal of Physics. D, Applied Physics (ISSN 1361-6463) http://www.iop.org/Additional details
Identifiers
- URL
- http://stacks.iop.org/0022-3727/37/2703/d4_19_013.pdf; http://www.iop.org/;
- DOI
- 10.1088/0022-3727/37/19/013;
- PII
- S0022-3727(04)81986-7;
Publishing Information
- Journal Title
- Journal of Physics. D, Applied Physics
- Journal Volume
- 37
- Journal Issue
- 19
- Journal Page Range
- p. 2703-2708
- ISSN
- 0022-3727
- CODEN
- JPAPBE
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36037275
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- COMPUTERIZED SIMULATION; COUPLING; DUSTS; ELECTRODES; ELECTRON DENSITY; IONS; LANGMUIR PROBE; MAGNETIC FIELDS; MAGNETRONS; PLASMA DENSITY; PLASMA POTENTIAL; ROTATION; SPUTTERING; TRAPPING
- Descriptors DEC
- CHARGED PARTICLES; ELECTRIC POTENTIAL; ELECTRIC PROBES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; MICROWAVE EQUIPMENT; MICROWAVE TUBES; MOTION; PROBES; SIMULATION