Published March 14, 2011
| Version v1
Journal article
Ab initio molecular dynamics of Al irradiation-induced processes during Al2O3 growth
Creators
- 1. Materials Chemistry, RWTH Aachen University, D-52056 Aachen (Germany)
- 2. Plasma and Coatings Physics Division, Linkoeping University, SE-58183 Linkoeping (Sweden)
Description
Al bombardment induced structural changes in α-Al2O3 (R-3c) and γ-Al2O3 (Fd-3m) were studied using ab initio molecular dynamics. Diffusion and irradiation damage occur for both polymorphs in the kinetic energy range from 3.5 to 40 eV. However, for γ-Al2O3(001) subplantation of impinging Al causes significantly larger irradiation damage and hence larger mobility as compared to α-Al2O3. Consequently, fast diffusion along γ-Al2O3(001) gives rise to preferential α-Al2O3(0001) growth, which is consistent with published structure evolution experiments.
Additional details
Identifiers
- DOI
- 10.1063/1.3570650;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 98
- Journal Issue
- 11
- Journal Page Range
- p. 111908-111908.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 42108974
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ALUMINIUM OXIDES; DIFFUSION; EV RANGE; EVOLUTION; ION BEAMS; IRRADIATION; MOBILITY; MOLECULAR DYNAMICS METHOD; PHASE TRANSFORMATIONS; SOLIDS
- Descriptors DEC
- ALUMINIUM COMPOUNDS; BEAMS; CALCULATION METHODS; CHALCOGENIDES; ENERGY RANGE; OXIDES; OXYGEN COMPOUNDS
Optional Information
- Notes
- (c) 2011 American Institute of Physics