Optical and electrical analysis of a temperature-dependent mode transition of a helium cryoplasma
Creators
- 1. Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa-shi, Chiba 277-8561 (Japan)
Description
A novel plasma source that can be generated at a cryogenic temperature, the so-called cryoplasma, was established under atmospheric pressure. Our cryoplasma system can easily control the processing temperature from room temperature down to 78 K using liquid nitrogen. We employed a dielectric barrier discharge reactor, which was connected to an ac power supply, and we flowed helium as the discharging gas. We found that plasma phenomena such as the discharge pattern and color showed temperature-dependent behavior as the gas temperature decreased. Furthermore, this result was closely related to changes in not only the emission spectra measured by optical emission spectroscopy but also the waveforms of the discharge currents and voltages. We concluded that the change in gas temperature induced a transition in the discharge modes.
Availability note (English)
Available from http://dx.doi.org/10.1088/0963-0252/18/2/025023Additional details
Identifiers
- DOI
- 10.1088/0963-0252/18/2/025023;
- PII
- S0963-0252(09)84932-3;
Publishing Information
- Journal Title
- Plasma Sources Science and Technology
- Journal Volume
- 18
- Journal Issue
- 2
- Journal Page Range
- [9 p.]
- ISSN
- 0963-0252
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 41034665
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ATMOSPHERIC PRESSURE; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; EMISSION SPECTRA; EMISSION SPECTROSCOPY; HELIUM; PLASMA; WAVE FORMS
- Descriptors DEC
- CURRENTS; ELEMENTS; FLUIDS; GASES; NONMETALS; RARE GASES; SPECTRA; SPECTROSCOPY