A research on the correlation between surface topography and angular distribution of sputtered atoms

The angular distributions of sputtered atoms of cadmium have been measured with 27 keV Ar+ ion bombardment at normal incidence with different target temperature by using collector technique and RBS analysis. After the sputtering experiment the surface structures have been observed by using scanning electron microscope. For all samples the angular distributions are over-cosine. However, the values of the deviation Δ from the cosine distribution at the axis of polar angle of 0 deg is not all the same. The deviation at the target temperature of 150 deg C, is smaller than that at room teperature. A simple model is proposed to explain the formation of the pattern of angular distribution