Design and characterization of a resonant triaxial microprobe

A new trend for tactile microprobes leads to oscillating microprobes in order to overcome the drawbacks resulting from high Hertzian stress and disturbing surface forces. Thin water films on the measurement surface result in the so-called sticking effect which causes measurement faults such as snap-back and false triggering. This leads to measurement errors and low measurement speeds. We present an innovative oscillating triaxial microprobe which safely avoids sticking in all Cartesian measurement directions. The system design as well as the characterization of the microprobe are presented in this work. The low number of coupling elements, the batch-capable design and the low contact forces are the key features of the microprobe. (paper)