Hollow metal target magnetron sputter type radio frequency ion source

A 70 mm diameter 70 mm long compact ion source equipped with a hollow sputtering target has been designed and tested. The hollow sputtering target serves as the radio frequency (RF) plasma excitation electrode at 13.56 MHz. A stable beam of Cu+ has been extracted when Ar was used as the discharge support gas. In the extracted beam, Cu+ had occupied more than 85% of the total ion current. Further increase in Cu+ ions in the beam is anticipated by increasing the RF power and Ar pressure