Development of synchrotron radiation source

Synchrotron radiation (SR) has the potential for industrial use, especially as a light source for ULSI lithography. Ishikawajima Harima has looked into SR market trend, and carried out the basic research for the last five years. The prototypes of the main components such as linac, radio frequency cavity and bending magnet were manufactured, and their performances were tested, while the required program codes were prepared for the design. After having confirmed the technical feasibility of the project, the development of the test device 'LUNA (Lithography Use New Accelerator)' was started in April, 1987. Meanwhile, the Tristan aluminum vacuum chamber for the National Laboratory for High Energy Physics and the beam transport system for Nippon Telephone and Telegraph Co. were manufactured, and their advice and cooperation were able to be obtained. These helped to acquire ultrahigh precision machining technology, ultra-high vacuum technology and welding technology. In April, 1989, the IHI synchrotron radiation facility was installed, and the test operation has been continued. In December, 1989, electron beam was accelerated to the final energy of 800 MeV. The LUNA is a low cost, stable light source in a short time, equipped with low energy injection and normal conduction magnets. (K.I.)