Published 2010 | Version v1
Journal article Metadata-only

Synchrotron and X-ray studies of spongy-like buried layers produced in silicon by helium implantation

Creators

  • 1. Ruder Baskovic Institute, P.O.Box 18010000 Zagreb (Croatia)
  • 2. Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, PL-02668 Warsaw (Poland)
  • 3. Institute of Electron Technology al. Lotnikow 32/46, PL-02668 Warsaw (Poland)
  • 4. Sincrotone Trieste, SS14 Basovizza, Trieste (Italy)

Description

no abstract available

Additional details

Identifiers

URL
https://www.synchrotron.org.pl/publ/publ/biulet/vo09/p097-Capan.pdf;

Publishing Information

Journal Title
Synchrotron Radiation in Natural Science
Journal Volume
9
Journal Issue
1-2
Journal Page Range
p. 97
ISSN
1644-7190

Conference

Title
10. International School and Symposium on Synchrotron Radiation in Natural Science
Acronym
ISSNRS-10
Dates
6-11 Jun 2010
Place
Szklarska Poreba (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
43006093
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
HELIUM IONS; INTERFACES; ION IMPLANTATION; SCATTERING; SILICON; SYNCHROTRON RADIATION; TOPOLOGICAL MAPPING; X-RAY DIFFRACTION
Descriptors DEC
BREMSSTRAHLUNG; CHARGED PARTICLES; COHERENT SCATTERING; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELEMENTS; IONS; MAPPING; RADIATIONS; SCATTERING; SEMIMETALS; TRANSFORMATIONS

Optional Information

Contract/Grant/Project number
Grant N202-052-32/1189; contract RII3-CT-2004-506008
Notes
1 ref., 1 fig.
Funding organization
Ministry of Science and Higher Education (Poland); European Community (International Atomic Energy Agency (IAEA)); DESY/HASYLAB (Germany)