Development of the X-ray standing waves methodology to probe the interfaces of periodic multilayers

The interfacial information of periodic multilayers can be crucial for the development of reflecting mirrors which operate in the X-ray and extreme ultraviolet (X-EUV) ranges. Such information may contain the interdiffusion and chemical process at the interfaces of the layers. The idea of this thesis is to apply the X-ray standing wave technique to the characterization of materials, mainly but not limited to the periodic multilayers. X-ray standing wave technique enables to enhance the excitation (photoemission, fluorescence etc.) of specific locations within a periodic stack. The nature of such advantage is the interference of two coherent X-ray beams. One may compare the X-ray standing waves with the mechanical standing waves. The constructive interference at the anti-nodal plane amplifies the electric field; while the destructive interference at the nodal plane minimizes the electric field. In this way, the experimental spectra obtained under standing wave field will be mostly the material located on the anti-nodal plane. Combined with other techniques such as X-ray emission spectroscopy and X-ray photoelectron spectroscopy, a depth-selective information with a sub-nanoscale sensitivity can be obtained. (author)