Published August 7, 2014 | Version v1
Journal article Metadata-only

Impact of thermal stress on the piezoelectric and dielectric properties of PbTiO3 thick films on various substrates

Creators

  • 1. Department of Materials Science and Engineering and National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093 (China)
  • 2. College of Electronic Science and Engineering and Microelectronic Information Functional Materials and Devices Research Center, Nanjing University of Posts and Telecommunications, Nanjing 210046 (China)
  • 3. College of Electronic and information Engineering, Hebei University, Baoding 071002 (China)

Description

The impact of thermal stress on the polarization, as well as dielectric and piezoelectric properties of (001) oriented PbTiO3 (PTO) thick films deposited on various substrates was investigated based on Landau-Devonshire thermodynamic model. The results showed that dielectric and piezoelectric properties of PTO films depend strongly on the thermal stress in PTO films decided by the deposition temperature TG and the thermal expansion coefficients' difference between PTO films and substrates. For IC-compatible substrates such as Si, c-sapphire, and a-sapphire that induce tensile in-plane thermal stresses, the dielectric and piezoelectric responses and tunabilities of PTO films were enhanced. Whereas for PTO films on MgO, compressive thermal in-plane stresses can degraded the dielectric and piezoelectric responses and tunabilities of the films

Additional details

Identifiers

DOI
10.1063/1.4891978;

Publishing Information

Journal Title
Journal of Applied Physics
Journal Volume
116
Journal Issue
5
Journal Page Range
p. 054103-054103.5
ISSN
0021-8979
CODEN
JAPIAU

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
46020758
Subject category
S36: MATERIALS SCIENCE; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Descriptors DEI
DEPOSITION; DEPOSITS; DIELECTRIC MATERIALS; DIELECTRIC PROPERTIES; FILMS; LEAD COMPOUNDS; MAGNESIUM OXIDES; PIEZOELECTRICITY; POLARIZATION; SAPPHIRE; SUBSTRATES; THERMAL EXPANSION; THERMAL STRESSES; THERMODYNAMIC MODEL; TITANATES
Descriptors DEC
ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; CORUNDUM; ELECTRICAL PROPERTIES; ELECTRICITY; EXPANSION; MAGNESIUM COMPOUNDS; MATERIALS; MATHEMATICAL MODELS; MINERALS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PARTICLE MODELS; PHYSICAL PROPERTIES; STATISTICAL MODELS; STRESSES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
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