Combined ion, electron, and X-ray beams for studies of surfaces and thin films

An ultra high vacuum system permitting in-situ studies and analyses using monoenergetic proton, argon-ion, electron and X-ray beams has been applied in studies of surfaces and thin films. The combination of the different beams in one chamber minimizes the uncertainties associated with analysis using just one of the techniques. Since the sample conditions are essentially unchanged between analyses, direct correlation of the results obtained by the various techniques is assured. A study of the interdiffusion of uranium and tellurium, using Rutherford backscattering and sputter-through Auger electron spectroscopy, is discussed as an example of this multi-technique approach. (Auth.)