Published March 7, 1990
| Version v1
Patent
Open
Method for analysis of solid surface
Description
A method for analysis of solid surface by spectroscopy of slow ion scattering on irradiation of an analyzed sample by hydrogen ions or those of its isotopes is proposed. To decrease the degree of destruction of the tested surface by an initial ion beam without reduction of the analysis sensitivity, negative hydrogen ions or those of its isotopes at about 2000 eV energy are used
Availability note (English)
MF available from INIS under the Report Number.Files
22041390.pdf
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Additional details
Additional titles
- Original title (Russian)
- Способ анализа поверхности твердого тела
Publishing Information
- Imprint Pagination
- 4 p.
- IPC:
- Int. Cl. G01N 23/203.
- IPC
- Int. Cl. G01N 23/203.
- Patent number
- SU patent document 1548726/A1/
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 22041390
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- HYDROGEN IONS 1 MINUS; HYDROGEN ISOTOPES; ION SCATTERING ANALYSIS; KEV RANGE 01-10; SENSITIVITY; SOLIDS; SURFACES
- Descriptors DEC
- ANIONS; CHARGED PARTICLES; CHEMICAL ANALYSIS; ENERGY RANGE; HYDROGEN IONS; IONS; KEV RANGE; NONDESTRUCTIVE ANALYSIS
Optional Information
- Secondary number(s)
- SU patent application 4374632/31-25.