Surface Deformations of Optical Elements -An Investigation of Optical Systems Using the BESSY-NOM

The surface shape of optical elements is affected by their mounting (support, holder, clamping, cooling). The BESSY Nano Optic Measuring Machine (NOM) gives the opportunity to analyze these effects on the nanometer scale and sub-nanometer scale. Linescans of surface profiles and the linescan-based 3-dimensional measurement feature of the NOM were used to characterize the surface shapes. In several configurations considering optical elements for the synchtrotron radiation application knowledge and effects about surface deformations due to mirror supports and coolings will be discussed. In this context a proposal for an adaptive mirror and the possible application in a BESSY-beamline will be presented