Suppression of macroparticle emission in vacuum arc plasma sources

Methods of suppression of emission of micro- and nanoparticles, also referred to as droplets in vacuum arc plasma sources without filtering systems, are reviewed in this paper. There are considered 12 variants of the pulsed and steady-state sources of a plasma flow with small macroparticle contamination including the classic one, which are based on magnetic fields of different configuration and reactive gases inlet as well as nontraditional devices, based on the hot refractory anode vacuum arc and the shunting vacuum arc discharge