Published September 2002 | Version v1
Journal article

Flat three-electrode axial-symmetric lens with superimposed matched magnetic filed as objective lens of microprobe system

  • 1. Sankt-Peterburgskij Inst. Informatiki i Avtomatizatsii RAN, Sankt-Peterburg (Russian Federation)
  • 2. Inst. Rentgenovskoj Optiki, Moscow (Russian Federation)

Description

The possibility of significant decrease in the coefficients of both the spherical and chromatic aberrations in the flat combined axial-symmetric lenses as compared to purely magnetic lenses is demonstrated. This takes place by the proper choice of the ration of geometrical sizes of the electrodes and pole tips of the combined lens, electrical potentials on its electrodes and ampere-turns in the excitation coil

Abstract (Russian)

Продемонстрирована возможность значительного снижения коэффициентов как сферической, так и хроматической аберрации в плоских комбинированных осесимметричных линзах по сравнению с чисто магнитными линзами. Это происходит при надлежащем выборе соотношения геометрических размеров электродов и полюсных наконечников комбинированной линзы, электрических потенциалов на ее электродах и ампер-витков в катушке возбуждения

Additional details

Additional titles

Original title (Russian)
Ploskaya trekhehlektrodnaya osesimmetrichnaya ehlektrostaticheskaya linza (s nalozhennym soosnym magnitnym polem) v kachestve ob''ektiva dlya mikrozondovoj sistemy

Publishing Information

Journal Title
Izvestiya Akademii Nauk. Rossijskaya Akademiya Nauk. Seriya Fizicheskaya
Journal Volume
66
Journal Issue
9
Journal Page Range
p. 1329-1331
ISSN
1026-3489
CODEN
IRAFEO

Conference

Title
SEM-2001 symposium
Original Conference Title
12. Rossijskij simpozium po rastrovoj ehlektronnoj mikroskopii i analiticheskim metodam issledovaniya tverdykh tel
Dates
Jun 2001
Place
Chernogolovka, Moscow Reg. (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
35008526
Subject category
S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTRIC POTENTIAL; ELECTRODES; ELECTRON BEAMS; ELECTROSTATIC LENSES; FOCUSING; MAGNET CORES; MAGNETIC FIELDS; NUMERICAL SOLUTION
Descriptors DEC
BEAMS; LENSES; LEPTON BEAMS; MATHEMATICAL SOLUTIONS; PARTICLE BEAMS

Optional Information

Notes
11 refs., 2 figs.