Published August 16, 1989 | Version v1
Journal article

High energy heavy ion irradiation of silicon

  • 1. CIRIL, Caen (France)
  • 2. LERMAT, ISMRa, Caen (France)
  • 3. Poitiers Univ., 86 (France)
  • 4. Polska Akademia Nauk, Warsaw (Poland). Inst. Fizyki

Description

In the search of defect creation by a mechanism involving collective electron excitation, samples of silicon are irradiated by Kr and Xe ions, the energies of which were 3.7 and 3.5 GeV, respectively. The damage is investigated using the in-situ resistance measurement on samples piled-up along the beam direction for the high electronic stopping power range between 3.7 to 14 MeV/μm. A normalization of all the data by the number of displaced atoms per atom resulting from elastic collisions shows that inelastic collisions are inefficient in the defect creation. (author)

Additional details

Publishing Information

Journal Title
Physica Status Solidi A
Journal Volume
114
Journal Issue
2
Series
Phys. Status Solidi A.
Journal Page Range
467-473
ISSN
0031-8965
CODEN
PSSAB