Published November 15, 1973 | Version v1
Journal article

Electrical properties of proton-bombarded Ga/sub 1-X/Al/sub x/As

  • 1. Centre Nacional des Telecommunications, Lannion, France

Description

We have shown the feasibility of forming insulating walls in Ga1−xAlxAs by proton bombardment, and have demonstrated their stability up to a temperature of 180°C. The mean projected range of protons in Ga1−xAlxAs is determined for energies ranging from 200 to 1200 keV. The insulating properties of proton-bombarded layers are applied to the realization of cross-bar integrated arrays of electroluminescent diodes.

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
23
Journal Issue
10
Series
Appl. Phys. Lett.
Journal Page Range
546-547
ISSN
0003-6951

Optional Information

Notes
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