Published May 1, 2014 | Version v1
Journal article

1.2 MeV/amu Xe ion induced damage recovery in SiC

  • 1. Centre for HRTEM, Nelson Mandela Metropolitan University, Port Elizabeth (South Africa)
  • 2. Joint Institute for Nuclear Research, Dubna (Russian Federation)

Description

The microstructural changes of 4H-SiC samples dual irradiated with either low energy He (10 keV) or Ti (220 keV) and high energy (167 MeV) Xe ions has been studied using cross-sectional transmission electron microscopy. It was found that xenon ions with fluences above 1013 cm−2 restore crystallinity in a heavily damaged partially amorphous zone. No significant damage recovery was observed in fully amorphized layers of silicon carbide apart from a 5% reduction in the amorphous layer thickness

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2013.09.034

Additional details

Identifiers

DOI
10.1016/j.nimb.2013.09.034;
PII
S0168-583X(14)00046-9;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
326
Journal Page Range
p. 337-340
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
17. international conference on radiation effects in insulators (REI)
Acronym
REI-2013
Dates
30 Jun - 5 Jul 2013
Place
Helsinki (Finland)

INIS

Optional Information

Copyright
Copyright (c) 2014 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.